发明授权
- 专利标题: Variable resistance memory device and method of fabricating the same
- 专利标题(中): 可变电阻存储器件及其制造方法
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申请号: US13742598申请日: 2013-01-16
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公开(公告)号: US08735860B2公开(公告)日: 2014-05-27
- 发明人: Jintaek Park , Youngwoo Park , Jungdal Choi
- 申请人: Jintaek Park , Youngwoo Park , Jungdal Choi
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2012-0045607 20120430
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
A variable resistance memory device includes a selection transistor, which includes a first doped region and a second doped region, a vertical electrode coupled to the first doped region of the selection transistor, a bit line coupled to the second doped region of the selection transistor, a plurality of word lines stacked on the substrate along a sidewall of the vertical electrode, variable resistance patterns between the word lines and the vertical electrode, and an insulating isolation layer between the word lines. The variable resistance patterns are spaced apart from each other in a direction normal to a top surface of the substrate by the insulating isolation layer.
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