发明授权
- 专利标题: Probe card stiffener with decoupling
- 专利标题(中): 探头卡加强件与去耦
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申请号: US12967302申请日: 2010-12-14
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公开(公告)号: US08736294B2公开(公告)日: 2014-05-27
- 发明人: Kevin S. Chang , Eric D. Hobbs
- 申请人: Kevin S. Chang , Eric D. Hobbs
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理机构: Kirton McConkie
- 主分类号: G01R31/00
- IPC分类号: G01R31/00
摘要:
A stiffener for a probe card assembly can include decoupling mechanisms disposed within radial arms of the stiffener. The decoupling mechanisms can be compliant in a direction along a radial direction of said radial arm and rigid in a direction perpendicular to said radial arm. The decoupling mechanisms can decouple the stiffener from thermally induced differential radial contraction and expansion of the stiffener relative to the cardholder to which the stiffener is mounted. This can reduce thermally-induced vertical translation of the probe card assembly.
公开/授权文献
- US20120146679A1 PROBE CARD STIFFENER WITH DECOUPLING 公开/授权日:2012-06-14
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