发明授权
US08737438B2 Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
有权
用于实现激光成形为线束和沉积在基底上的膜之间的相互作用的系统和方法
- 专利标题： Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
- 专利标题（中）： 用于实现激光成形为线束和沉积在基底上的膜之间的相互作用的系统和方法
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申请号： US13571129申请日： 2012-08-09
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公开(公告)号： US08737438B2公开(公告)日： 2014-05-27
- 发明人: Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
- 申请人： Palash P. Das , Thomas Hofmann , Jesse D. Davis , Richard L. Sandstrom
- 申请人地址： US CA San Diego
- 专利权人： Cymer, LLC
- 当前专利权人： Cymer, LLC
- 当前专利权人地址： US CA San Diego
- 代理机构： Procopio, Cory, Hargreaves & Savitch LLP
- 代理商 Noel C. Gillespie
- 主分类号： H01S3/10
- IPC分类号： H01S3/10
摘要：
A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.