发明授权
- 专利标题： Micromachined inertial sensor devices
- 专利标题（中）： 微加工惯性传感器装置
-
申请号： US12849742申请日： 2010-08-03
-
公开(公告)号： US08739626B2公开(公告)日： 2014-06-03
- 发明人: Cenk Acar
- 申请人： Cenk Acar
- 申请人地址： US CA San Jose
- 专利权人： Fairchild Semiconductor Corporation
- 当前专利权人： Fairchild Semiconductor Corporation
- 当前专利权人地址： US CA San Jose
- 代理机构： Schwegman, Lundberg & Woessner, P.A.
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
A micromachined inertial sensor with a single proof-mass for measuring 6-degree-of-motions. The single proof-mass includes a frame, an x-axis proof mass section attached to the frame by a first flexure, and a y-axis proof mass section attached to the frame by a second flexure. The single proof-mass is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.
公开/授权文献
- US20110030473A1 MICROMACHINED INERTIAL SENSOR DEVICES 公开/授权日：2011-02-10
信息查询
