Invention Grant
US08742380B2 Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target 有权
目标供给装置,极紫外线发生装置以及供给靶的方法

Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
Abstract:
A target supply device is provided that may include a pair of rails arranged to face each other, the rails having electrically conductive properties, a target transport mechanism configured to supply a target material into a space between the rails and in contact with the rails, and a power supply connected to the rails and configured to supply a current to the target material through the rails. Methods and systems using the target supply device are also provided.
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