Invention Grant
- Patent Title: Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
- Patent Title (中): 目标供给装置,极紫外线发生装置以及供给靶的方法
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Application No.: US13679930Application Date: 2012-11-16
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Publication No.: US08742380B2Publication Date: 2014-06-03
- Inventor: Tsukasa Hori , Hideo Hoshino , Tatsuya Yanagida
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-040182 20120227
- Main IPC: G21K5/02
- IPC: G21K5/02 ; G21K5/04

Abstract:
A target supply device is provided that may include a pair of rails arranged to face each other, the rails having electrically conductive properties, a target transport mechanism configured to supply a target material into a space between the rails and in contact with the rails, and a power supply connected to the rails and configured to supply a current to the target material through the rails. Methods and systems using the target supply device are also provided.
Public/Granted literature
- US20130221246A1 TARGET SUPPLY DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND METHOD FOR SUPPLYING TARGET Public/Granted day:2013-08-29
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