发明授权
- 专利标题: Piezoelectric/electrostrictive element
- 专利标题(中): 压电/电致伸缩元件
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申请号: US12032128申请日: 2008-02-15
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公开(公告)号: US08742650B2公开(公告)日: 2014-06-03
- 发明人: Hideki Shimizu , Takashi Ebigase
- 申请人: Hideki Shimizu , Takashi Ebigase
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown, PLLC
- 主分类号: H01L41/04
- IPC分类号: H01L41/04 ; H01L41/187 ; H01L41/047
摘要:
In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
公开/授权文献
- US20080213575A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT 公开/授权日:2008-09-04
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