发明授权
- 专利标题: Approach for phase change memory cells targeting different device specifications
- 专利标题(中): 针对不同设备规格的相变存储单元的方法
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申请号: US13421718申请日: 2012-03-15
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公开(公告)号: US08743599B2公开(公告)日: 2014-06-03
- 发明人: Matthew J. BrightSky , Roger W. Cheek , Ming-Hsiu Lee
- 申请人: Matthew J. BrightSky , Roger W. Cheek , Ming-Hsiu Lee
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Ido Tuchman; Vazken Alexanian
- 主分类号: G11C11/00
- IPC分类号: G11C11/00 ; G11C13/00
摘要:
A memory chip and methods of fabricating a memory device with different programming performance and retention characteristics on a single wafer. One method includes depositing a first bounded area of phase change material on the wafer and depositing a second bounded area of phase change material on the wafer. The method includes modifying the chemical composition of a switching volume of the first bounded area of phase change material. The method includes forming a first memory cell in the first bounded area of phase change material with a modified switching volume of phase change material and a second memory cell in the second bounded area of phase change material with an unmodified switching volume of phase change material such that the first memory cell has a first retention property and the second memory cell has a second retention property. The first retention property is different from the second retention property.
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