发明授权
US08746130B2 Diaphragm pump 有权
隔膜泵

Diaphragm pump
摘要:
A diaphragm pump includes a pump chamber having an inlet opening and an outlet opening. A passive silicon check valve is provided at the inlet opening, and a passive silicon check valve is provided at the outlet opening. The diaphragm pump further includes a metallic pump diaphragm that adjoins the pump chamber.
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