Invention Grant
- Patent Title: Methods and apparatus for treating exhaust gas in a processing system
- Patent Title (中): 在处理系统中处理废气的方法和装置
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Application No.: US12957539Application Date: 2010-12-01
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Publication No.: US08747762B2Publication Date: 2014-06-10
- Inventor: Colin John Dickinson , Mehran Moalem , Daniel O. Clark
- Applicant: Colin John Dickinson , Mehran Moalem , Daniel O. Clark
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: B01J19/08
- IPC: B01J19/08

Abstract:
Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas upstream of the foreline.
Public/Granted literature
- US20110135552A1 METHODS AND APPARATUS FOR TREATING EXHAUST GAS IN A PROCESSING SYSTEM Public/Granted day:2011-06-09
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