发明授权
- 专利标题: Method and device for the internal plasma treatment of hollow bodies
- 专利标题(中): 中空体内部等离子体处理方法和装置
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申请号: US12063761申请日: 2006-08-24
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公开(公告)号: US08747962B2公开(公告)日: 2014-06-10
- 发明人: Matthias Bicker , Robert Hormes , Manfred Lohmeyer
- 申请人: Matthias Bicker , Robert Hormes , Manfred Lohmeyer
- 申请人地址: DE
- 专利权人: Schott AG
- 当前专利权人: Schott AG
- 当前专利权人地址: DE
- 代理机构: Kaplan Breyer Schwarz & Ottesen
- 优先权: DE102005040266 20050824
- 国际申请: PCT/EP2006/008302 WO 20060824
- 国际公布: WO2007/022976 WO 20070301
- 主分类号: H05H1/24
- IPC分类号: H05H1/24 ; G10K1/064 ; C07C1/00 ; C07C2/00 ; C07C4/00
摘要:
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.
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