发明授权
US08747962B2 Method and device for the internal plasma treatment of hollow bodies 有权
中空体内部等离子体处理方法和装置

Method and device for the internal plasma treatment of hollow bodies
摘要:
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.
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