发明授权
- 专利标题: Resonator element with mass formed on vibrating arm
- 专利标题(中): 振动臂上形成质量的谐振元件
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申请号: US12976163申请日: 2010-12-22
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公开(公告)号: US08760041B2公开(公告)日: 2014-06-24
- 发明人: Hiroki Kawai
- 申请人: Hiroki Kawai
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2009-299045 20091229; JP2010-180100 20100811
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H03H9/21
摘要:
A resonator element includes: a base portion provided on a plane including a first axis and a second axis orthogonal to the first axis; a vibrating arm extending from the base portion in the first axis direction; and a first mass portion for adjusting a resonance frequency of the vibrating arm, wherein the vibrating arm performs flexural vibration in a direction perpendicular to the plane and has a first surface which contracts or expands with the flexural vibration and a second surface which expands when the first surface contracts and contracts when the first surface expands, and wherein the first mass portion is provided on at least one of the first and second surfaces and approximately at the center of the length of the vibrating arm from a base-side end to a tip end thereof.
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