Invention Grant
US08771806B2 Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma
有权
在大气压等离子体中进行疏水和超疏水处理的表面涂层方法
- Patent Title: Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma
- Patent Title (中): 在大气压等离子体中进行疏水和超疏水处理的表面涂层方法
-
Application No.: US11988442Application Date: 2006-07-07
-
Publication No.: US08771806B2Publication Date: 2014-07-08
- Inventor: Bang-Kwon Kang
- Applicant: Bang-Kwon Kang
- Agency: Lowe Hauptman & Ham, LLP
- Priority: KR10-2005-0061970 20050709
- International Application: PCT/KR2006/002670 WO 20060707
- International Announcement: WO2007/007995 WO 20070118
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/22

Abstract:
The present invention relates to a method of coating fluorocarbon or hydrocarbon on the surface of a workpiece using atmospheric pressure plasma. More particularly, the present invention relates to a method of coating hydrocarbon or fluorocarbon on the surface of a workpiece using plasma generated under atmospheric pressure such that the workpiece can have a hydrophobic or super-hydrophobic surface.The method of coating a surface of a workpiece with fluorocarbon to be hydrophobic or super-hydrophobic according to the present invention comprises the steps of generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.
Public/Granted literature
- US20100221452A1 Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma Public/Granted day:2010-09-02
Information query
IPC分类: