公开(公告)号：US20100221452A1

公开(公告)日：2010-09-02

申请号：US11988442

申请日：2006-07-07

Applicant: Bang-Kwon Kang

Inventor： Bang-Kwon Kang

IPC: C23C16/50 ,  C23C16/22

CPC classification number: C23C16/50 ,  B05D1/62 ,  B05D5/083 ,  B05D2201/04 ,  B05D2202/00 ,  B05D2203/35 ,  C23C16/22 ,  C23C16/26

Abstract: The present invention relates to a method of coating fluorocarbon or hydrocarbon on the surface of a workpiece using atmospheric pressure plasma. More particularly, the present invention relates to a method of coating hydrocarbon or fluorocarbon on the surface of a workpiece using plasma generated under atmospheric pressure such that the workpiece can have a hydrophobic or super-hydrophobic surface.The method of coating a surface of a workpiece with fluorocarbon to be hydrophobic or super-hydrophobic according to the present invention comprises the steps of generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.

Abstract translation: 本发明涉及使用大气压等离子体在工件表面上涂覆碳氟化合物或碳氢化合物的方法。 更具体地说，本发明涉及使用在大气压下产生的等离子体在工件表面上涂覆碳氢化合物或碳氟化合物的方法，使得工件可以具有疏水或超疏水表面。 根据本发明的将碳氟化合物表面涂覆为疏水或超疏水的工件表面的方法包括以下步骤：通过将反应气体供应到形成在第一电极和第二电极之间的放电空间中来产生第一大气压发光等离子体 电极，含有氢气的反应气体，碳氟化合物气体和惰性气体，第一和第二电极连接到大气压等离子体发生器的RF电源; 并使工件接近通过放电空间的反应气体流下游的第一电极，使得在放电空间中产生的等离子体转移到第一电极和工件之间的空间中，以在其中产生第二大气压发光等离子体 由此可以在工件的表面上形成氟碳涂层。

公开(公告)号：US08771806B2

公开(公告)日：2014-07-08

申请号：US11988442

申请日：2006-07-07

Applicant: Bang-Kwon Kang

Inventor： Bang-Kwon Kang

IPC: C23C16/50 ,  C23C16/22

CPC classification number: C23C16/50 ,  B05D1/62 ,  B05D5/083 ,  B05D2201/04 ,  B05D2202/00 ,  B05D2203/35 ,  C23C16/22 ,  C23C16/26

Abstract: The present invention relates to a method of coating fluorocarbon or hydrocarbon on the surface of a workpiece using atmospheric pressure plasma. More particularly, the present invention relates to a method of coating hydrocarbon or fluorocarbon on the surface of a workpiece using plasma generated under atmospheric pressure such that the workpiece can have a hydrophobic or super-hydrophobic surface.The method of coating a surface of a workpiece with fluorocarbon to be hydrophobic or super-hydrophobic according to the present invention comprises the steps of generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.

Abstract translation: 本发明涉及使用大气压等离子体在工件表面上涂覆碳氟化合物或碳氢化合物的方法。 更具体地说，本发明涉及使用在大气压下产生的等离子体在工件表面上涂覆碳氢化合物或碳氟化合物的方法，使得工件可以具有疏水或超疏水表面。 根据本发明的将碳氟化合物表面涂覆为疏水或超疏水的工件表面的方法包括以下步骤：通过将反应气体供应到形成在第一电极和第二电极之间的放电空间中来产生第一大气压发光等离子体 电极，含有氢气的反应气体，碳氟化合物气体和惰性气体，第一和第二电极连接到大气压等离子体发生器的RF电源; 并使工件接近通过放电空间的反应气体流下游的第一电极，使得在放电空间中产生的等离子体转移到第一电极和工件之间的空间中，以在其中产生第二大气压发光等离子体 由此可以在工件的表面上形成氟碳涂层。