发明授权
- 专利标题: Vertical channel memory and manufacturing method thereof and operating method using the same
- 专利标题(中): 垂直通道存储器及其制造方法及其使用方法
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申请号: US11785322申请日: 2007-04-17
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公开(公告)号: US08772858B2公开(公告)日: 2014-07-08
- 发明人: Tzu-Hsuan Hsu , Hang-Ting Lue
- 申请人: Tzu-Hsuan Hsu , Hang-Ting Lue
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes Beffel & Wolfeld LLP
- 代理商 Kentz Suzue
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
A vertical channel memory including a substrate, a channel, a multi-layer structure, a gate, a first terminal and a second terminal is provided. The channel protrudes from the substrate and has a top surface and two vertical surfaces. The multi-layer structure is disposed on the two vertical surfaces of the channel. The gate straddling multi-layer structure is positioned above the two vertical surfaces of the channel. The first terminal and the second terminal are respectively positioned at two sides of the channel opposing to the gate.
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