发明授权
- 专利标题: Silicon purification method and silicon purification device
- 专利标题(中): 硅纯化方法和硅精制装置
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申请号: US13395895申请日: 2010-09-17
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公开(公告)号: US08778143B2公开(公告)日: 2014-07-15
- 发明人: Yasuo Ookubo , Hiroshi Nagata
- 申请人: Yasuo Ookubo , Hiroshi Nagata
- 申请人地址: JP Chigasaki-Shi
- 专利权人: ULVAC, Inc.
- 当前专利权人: ULVAC, Inc.
- 当前专利权人地址: JP Chigasaki-Shi
- 代理机构: Grossman, Tucker, Perreault & Pfleger, PLLC
- 优先权: JPP2009-217117 20090918; JPP2009-217118 20090918; JPP2009-217119 20090918
- 国际申请: PCT/JP2010/066209 WO 20100917
- 国际公布: WO2011/034172 WO 20110324
- 主分类号: H05F3/00
- IPC分类号: H05F3/00
摘要:
The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20° to 80°.
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