发明授权
US08778143B2 Silicon purification method and silicon purification device 有权
硅纯化方法和硅精制装置

  • 专利标题: Silicon purification method and silicon purification device
  • 专利标题(中): 硅纯化方法和硅精制装置
  • 申请号: US13395895
    申请日: 2010-09-17
  • 公开(公告)号: US08778143B2
    公开(公告)日: 2014-07-15
  • 发明人: Yasuo OokuboHiroshi Nagata
  • 申请人: Yasuo OokuboHiroshi Nagata
  • 申请人地址: JP Chigasaki-Shi
  • 专利权人: ULVAC, Inc.
  • 当前专利权人: ULVAC, Inc.
  • 当前专利权人地址: JP Chigasaki-Shi
  • 代理机构: Grossman, Tucker, Perreault & Pfleger, PLLC
  • 优先权: JPP2009-217117 20090918; JPP2009-217118 20090918; JPP2009-217119 20090918
  • 国际申请: PCT/JP2010/066209 WO 20100917
  • 国际公布: WO2011/034172 WO 20110324
  • 主分类号: H05F3/00
  • IPC分类号: H05F3/00
Silicon purification method and silicon purification device
摘要:
The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20° to 80°.
信息查询
0/0