发明授权
- 专利标题: Thin film transistor
- 专利标题(中): 薄膜晶体管
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申请号: US13701028申请日: 2011-05-23
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公开(公告)号: US08779478B2公开(公告)日: 2014-07-15
- 发明人: Masao Moriguchi , Michiko Takei , Yohsuke Kanzaki , Tsuyoshi Inoue , Tetsuo Fukaya , Yudai Takanishi , Takatsugu Kusumi , Yoshiki Nakatani , Tetsuya Okamoto , Kenji Nakanishi
- 申请人: Masao Moriguchi , Michiko Takei , Yohsuke Kanzaki , Tsuyoshi Inoue , Tetsuo Fukaya , Yudai Takanishi , Takatsugu Kusumi , Yoshiki Nakatani , Tetsuya Okamoto , Kenji Nakanishi
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2010-125655 20100601
- 国际申请: PCT/JP2011/002859 WO 20110523
- 国际公布: WO2011/151990 WO 20111208
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/66 ; H01L29/786 ; H01L29/24
摘要:
A TFT 20 includes a gate electrode 21, a gate insulating film 22, a semiconductor layer 23, a source electrode 24, a drain electrode 25, etc. The semiconductor layer 23 is comprised of a metal oxide semiconductor (IGZO), and has a source portion 23a that contacts the source electrode 24, a drain electrode 23b that contacts the drain electrode 25, and a channel portion 23c that is located between the source and drain portions 23a, 23b. A reduced region 30 is formed at least in the channel portion 23c of the semiconductor layer 23, and the reduced region 30 has a higher content of a simple substance of a metal such as In than the remaining portion of the semiconductor layer 23.
公开/授权文献
- US20130175521A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF 公开/授权日:2013-07-11
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