Invention Grant
- Patent Title: Via-free interconnect structure with self-aligned metal line interconnections
- Patent Title (中): 具有自对准金属线互连的无通孔互连结构
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Application No.: US13461224Application Date: 2012-05-01
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Publication No.: US08779592B2Publication Date: 2014-07-15
- Inventor: Yu-Po Tang , Shih-Ming Chang , Ken-Hsien Hsieh , Ru-Gun Liu
- Applicant: Yu-Po Tang , Shih-Ming Chang , Ken-Hsien Hsieh , Ru-Gun Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L27/10 ; H01L29/74

Abstract:
The present disclosure provides a semiconductor device. The semiconductor device includes a first conductive line disposed over a substrate. The first conductive line is located in a first interconnect layer and extends along a first direction. The semiconductor device includes a second conductive line and a third conductive line each extending along a second direction different from the first direction. The second and third conductive lines are located in a second interconnect layer that is different from the first interconnect layer. The second and third conductive lines are separated by a gap that is located over or below the first conductive line. The semiconductor device includes a fourth conductive line electrically coupling the second and third conductive lines together. The fourth conductive line is located in a third interconnect layer that is different from the first interconnect layer and the second interconnect layer.
Public/Granted literature
- US20130292836A1 VIA-FREE INTERCONNECT STRUCTURE WITH SELF-ALIGNED METAL LINE INTERCONNECTIONS Public/Granted day:2013-11-07
Information query
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