发明授权
- 专利标题: Via-free interconnect structure with self-aligned metal line interconnections
- 专利标题(中): 具有自对准金属线互连的无通孔互连结构
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申请号: US13461224申请日: 2012-05-01
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公开(公告)号: US08779592B2公开(公告)日: 2014-07-15
- 发明人: Yu-Po Tang , Shih-Ming Chang , Ken-Hsien Hsieh , Ru-Gun Liu
- 申请人: Yu-Po Tang , Shih-Ming Chang , Ken-Hsien Hsieh , Ru-Gun Liu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L27/10 ; H01L29/74
摘要:
The present disclosure provides a semiconductor device. The semiconductor device includes a first conductive line disposed over a substrate. The first conductive line is located in a first interconnect layer and extends along a first direction. The semiconductor device includes a second conductive line and a third conductive line each extending along a second direction different from the first direction. The second and third conductive lines are located in a second interconnect layer that is different from the first interconnect layer. The second and third conductive lines are separated by a gap that is located over or below the first conductive line. The semiconductor device includes a fourth conductive line electrically coupling the second and third conductive lines together. The fourth conductive line is located in a third interconnect layer that is different from the first interconnect layer and the second interconnect layer.
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