Invention Grant
- Patent Title: Semiconductor device having high-frequency interconnect
- Patent Title (中): 具有高频互连的半导体器件
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Application No.: US13871448Application Date: 2013-04-26
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Publication No.: US08779595B2Publication Date: 2014-07-15
- Inventor: Yasutaka Nakashiba
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2007-61990 20070312
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/48 ; H01L29/40 ; H01L29/00

Abstract:
Provided is a semiconductor device including high-frequency interconnect and dummy conductor patterns (second dummy conductor patterns). The dummy conductor patterns are disposed in a interconnect layer different from a interconnect layer in which the high-frequency interconnect is disposed. The dummy conductor patterns are disposed so as to keep away from a region overlapping the high-frequency interconnect in plan view. The semiconductor device further includes dummy conductor patterns (first dummy conductor patterns) in the interconnect layer in which the high-frequency interconnect is disposed.
Public/Granted literature
- US20130234286A1 SEMICONDUCTOR DEVICE HAVING HIGH-FREQUENCY INTERCONNECT Public/Granted day:2013-09-12
Information query
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