发明授权
- 专利标题: Evaluation device, measuring arrangement and method for path length measurement and measuring system and method for a coordinate measuring device and coordinate measuring device
- 专利标题(中): 轨迹长度测量的测量装置,测量装置和方法以及坐标测量装置和坐标测量装置的测量系统和方法
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申请号: US13377440申请日: 2010-06-10
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公开(公告)号: US08780331B2公开(公告)日: 2014-07-15
- 发明人: Bernd Spruck , Frank Hoeller , Cristina Alvarez Diez
- 申请人: Bernd Spruck , Frank Hoeller , Cristina Alvarez Diez
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss AG
- 当前专利权人: Carl Zeiss AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Sand & Sebolt
- 优先权: DE102009024464 20090610
- 国际申请: PCT/EP2010/058138 WO 20100610
- 国际公布: WO2010/142757 WO 20101216
- 主分类号: G01C3/08
- IPC分类号: G01C3/08
摘要:
An evaluation device for path length measurement configured to evaluate a measured signal representing an intensity of a sequence of pulses of electromagnetic radiation, particularly a sequence of light pulses, as a function of time, after the sequence has traveled through a path length to be measured. The sequence of light pulses is generated with a repetition rate by a radiation source, particularly a light source. The evaluation device is configured to evaluate a first component of the measured signal, which oscillates with a first frequency, and a second component of the measured signal, which the second component oscillates with a second frequency that is greater than the first frequency. The first frequency may correspond to the repetition rate or a multiple of the repetition rate. The second frequency may correspond to another multiple of the repetition rate.
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