公开(公告)号：US08780331B2

公开(公告)日：2014-07-15

申请号：US13377440

申请日：2010-06-10

申请人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

发明人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

IPC分类号： G01C3/08

CPC分类号： G01S17/36 ,  G01S17/87

摘要： An evaluation device for path length measurement configured to evaluate a measured signal representing an intensity of a sequence of pulses of electromagnetic radiation, particularly a sequence of light pulses, as a function of time, after the sequence has traveled through a path length to be measured. The sequence of light pulses is generated with a repetition rate by a radiation source, particularly a light source. The evaluation device is configured to evaluate a first component of the measured signal, which oscillates with a first frequency, and a second component of the measured signal, which the second component oscillates with a second frequency that is greater than the first frequency. The first frequency may correspond to the repetition rate or a multiple of the repetition rate. The second frequency may correspond to another multiple of the repetition rate.

摘要翻译： 用于路径长度测量的评估装置，被配置为在所述序列经过要测量的路径长度之后，评估表示电磁辐射脉冲序列强度，特别是光脉冲序列作为时间的函数的测量信号 。 光脉冲的序列以辐射源，特别是光源的重复率产生。 评估装置被配置为评估测量信号的第一分量，其以第一频率振荡，并且测量信号的第二分量，其中第二分量以大于第一频率的第二频率振荡。 第一频率可以对应于重复率或重复率的倍数。 第二频率可以对应于重复频率的另一个倍数。

公开(公告)号：US20120218563A1

公开(公告)日：2012-08-30

申请号：US13394916

申请日：2010-08-30

申请人： Bernd Spruck ,  Cristina Alvarez Diez ,  Simon Brattke ,  Lars-Christian Wittig ,  Stefan Richter ,  Enrico Geissler ,  Christian Koos ,  Oliver Schmidt ,  Frank Hoeller

发明人： Bernd Spruck ,  Cristina Alvarez Diez ,  Simon Brattke ,  Lars-Christian Wittig ,  Stefan Richter ,  Enrico Geissler ,  Christian Koos ,  Oliver Schmidt ,  Frank Hoeller

IPC分类号： G01B11/14 ,  G01B11/24

CPC分类号： G01B11/24 ,  G01B11/002 ,  G01B11/026 ,  G01S5/16 ,  G01S17/10

摘要： In an embodiment a method for position determination of an object (25) in a spatial area (28) is provided in which the object (25) is illuminated with at least one light beam (22, 27). The light beam (22, 27) does not cover the complete spatial area (28) and is guided into a part of the spatial area in which the object (25) is present depending on the position of the object (25). In another aspect a method for measuring a surface is provided.

摘要翻译： 在一个实施例中，提供了一种用于在空间区域（28）中的物体（25）的位置确定的方法，其中用至少一个光束（22,27）照射物体（25）。 光束（22,27）不覆盖整个空间区域（28），并且根据物体（25）的位置被引导到存在物体（25）的空间区域的一部分。 在另一方面，提供了一种用于测量表面的方法。

公开(公告)号：US08692981B2

公开(公告)日：2014-04-08

申请号：US13377410

申请日：2010-06-10

申请人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

发明人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

IPC分类号： G01C3/08

CPC分类号： G01S17/36 ,  G01S7/4913 ,  G01S7/4915 ,  G01S2013/466

摘要： An evaluation device, measuring arrangement and method for path length measurement. The evaluation device for path length measurement is configured to evaluate a measured signal which represents an intensity of a sequence of pulses of electromagnetic radiation as a function of time. The sequence of pulses has a repetition rate. The evaluation device is configured to determine a phase difference between a component of the measured signal, the component oscillating with a frequency, and a reference signal which oscillates with the frequency. For this purpose, the evaluation device generates, for example by frequency mixing, a first signal and a second signal which have another phase difference, such that the first signal and the second signal each oscillates with another frequency which is different from said frequency, and that the other phase difference has a predetermined relation to the phase difference.

摘要翻译： 评估装置，路径长度测量的测量装置和方法。 用于路径长度测量的评估装置被配置为评估表示作为时间的函数的电磁辐射的脉冲序列的强度的测量信号。 脉冲序列具有重复率。 评估装置被配置为确定测量信号的分量，以频率振荡的分量与以频率振荡的参考信号之间的相位差。 为此，评估装置例如通过混频生成具有另一相位差的第一信号和第二信号，使得第一信号和第二信号各自以不同于所述频率的另一频率振荡，以及 另一个相位差具有与相位差的预定关系。

公开(公告)号：US20120092644A1

公开(公告)日：2012-04-19

申请号：US13377410

申请日：2010-06-10

申请人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

发明人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

IPC分类号： G01C3/08

CPC分类号： G01S17/36 ,  G01S7/4913 ,  G01S7/4915 ,  G01S2013/466

摘要： An evaluation device, measuring arrangement and method for path length measurement. The evaluation device for path length measurement is configured to evaluate a measured signal which represents an intensity of a sequence of pulses of electromagnetic radiation as a function of time. The sequence of pulses has a repetition rate. The evaluation device is configured to determine a phase difference between a component of the measured signal, the component oscillating with a frequency, and a reference signal which oscillates with the frequency. For this purpose, the evaluation device generates, for example by frequency mixing, a first signal and a second signal which have another phase difference, such that the first signal and the second signal each oscillates with another frequency which is different from said frequency, and that the other phase difference has a predetermined relation to the phase difference.

摘要翻译： 评估装置，路径长度测量的测量装置和方法。 用于路径长度测量的评估装置被配置为评估表示作为时间的函数的电磁辐射的脉冲序列的强度的测量信号。 脉冲序列具有重复率。 评估装置被配置为确定测量信号的分量，以频率振荡的分量与以频率振荡的参考信号之间的相位差。 为此，评估装置例如通过混频生成具有另一相位差的第一信号和第二信号，使得第一信号和第二信号各自以不同于所述频率的另一频率振荡，以及 另一个相位差具有与相位差的预定关系。

公开(公告)号：US20110176146A1

公开(公告)日：2011-07-21

申请号：US13061783

申请日：2009-08-22

申请人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

发明人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

IPC分类号： G01B11/24

CPC分类号： G01B11/002 ,  G01B11/24 ,  G01S7/4817 ,  G01S17/10 ,  G01S2013/466

摘要： A device for measuring a surface (2) comprises a light source (3), a light directing device (4-6), a detector arrangement (10) and an evaluation circuit (15). The light source (3) generates a sequence of light pulses with a repetition rate. The light directing device (4-6) is controllable to direct the sequence of light pulses onto a surface area (25) of the surface (2). The surface area may be selected from plural surface areas (25, 27). The detector arrangement is configured to receive at least one light signal (21-24) scattered and/or reflected by the surface area (25). The evaluation circuit (15) is coupled to the detector arrangement (10) and is configured to determine a phase difference between a reference signal (19) derived from the sequence of light pulses and a signal component of the at least one light signal (21-24), in order to determine a position of the surface area (25). In doing so, the phase difference is determined for the signal component which has a frequency corresponding to a multiple of the repetition rate.

摘要翻译： 用于测量表面（2）的装置包括光源（3），光引导装置（4-6），检测器装置（10）和评估电路（15）。 光源（3）产生具有重复频率的光脉冲序列。 导光装置（4-6）是可控制的，以将光脉冲序列引导到表面（2）的表面区域（25）上。 表面积可以从多个表面积（25,27）中选择。 检测器装置被配置为接收由表面区域（25）散射和/或反射的至少一个光信号（21-24）。 评估电路（15）耦合到检测器装置（10）并且被配置为确定从光脉冲序列导出的参考信号（19）与至少一个光信号（21）的信号分量之间的相位差 -24），以便确定表面积（25）的位置。 在这样做时，确定具有对应于重复频率的倍数的频率的信号分量的相位差。

公开(公告)号：US20110157603A1

公开(公告)日：2011-06-30

申请号：US13061786

申请日：2009-08-22

申请人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

发明人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

IPC分类号： G01B11/14 ,  G01S17/10

CPC分类号： G01B11/14 ,  G01S5/16 ,  G01S7/486 ,  G01S17/10 ,  G01S2013/466

摘要： A device for determining a position of an object (25) in a spatial region (28) comprises a light source (3), a light directing device (4-9), at least one reference signal detector (11, 12) and a detector arrangement (13, 14). The light source (3) generates a sequence of light pulses with a repetition rate. The light directing device (4-9) directs the sequence of light pulses into the spatial region (28) and, as a reference signal (20), to the at least one reference signal detector (11, 12). The detector arrangement (13, 14) detects a plurality of light signals (23, 24) which are reflected and/or scattered by the object (25) in the spatial region (28) into a plurality of different directions by reflection and/or scattering of the sequence of light pulses. The evaluation circuit (15) is coupled to the detector arrangement (13, 14) and the at least one reference signal detector (11, 12) and determines a phase difference (67) between the reference signal (20) and a signal component of at least one light signal (23, 24). The phase difference is determined based on the signal component which has a frequency that corresponds to a multiple of the repetition rate.

摘要翻译： 用于确定空间区域（28）中的物体（25）的位置的装置包括光源（3），光引导装置（4-9），至少一个参考信号检测器（11,12）和 检测器装置（13,14）。 光源（3）产生具有重复频率的光脉冲序列。 光引导装置（4-9）将光脉冲序列引导到空间区域（28）中，并作为参考信号（20）指向至少一个参考信号检测器（11,12）。 检测器装置（13,14）通过反射和/或检测装置（13,14）检测在空间区域（28）中由物体（25）反射和/或散射成多个不同方向的多个光信号（23,24） 光脉冲序列的散射。 评估电路（15）耦合到检测器装置（13,14）和至少一个参考信号检测器（11,12），并且确定参考信号（20）与信号分量的相位差（67） 至少一个光信号（23,24）。 基于具有与重复率的倍数相对应的频率的信号分量来确定相位差。

公开(公告)号：US09175947B2

公开(公告)日：2015-11-03

申请号：US13061786

申请日：2009-08-22

申请人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

发明人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

IPC分类号： G01B11/14 ,  G01S5/16 ,  G01S7/486 ,  G01S17/10 ,  G01S13/46

CPC分类号： G01B11/14 ,  G01S5/16 ,  G01S7/486 ,  G01S17/10 ,  G01S2013/466

摘要： A device for determining a position of an object (25) in a spatial region (28) comprises a light source (3), a light directing device (4-9), at least one reference signal detector (11, 12) and a detector arrangement (13, 14). The light source (3) generates a sequence of light pulses with a repetition rate. The light directing device (4-9) directs the sequence of light pulses into the spatial region (28) and, as a reference signal (20), to the at least one reference signal detector (11, 12). The detector arrangement (13, 14) detects a plurality of light signals (23, 24) which are reflected and/or scattered by the object (25) in the spatial region (28) into a plurality of different directions by reflection and/or scattering of the sequence of light pulses. The evaluation circuit (15) is coupled to the detector arrangement (13, 14) and the at least one reference signal detector (11, 12) and determines a phase difference (67) between the reference signal (20) and a signal component of at least one light signal (23, 24). The phase difference is determined based on the signal component which has a frequency that corresponds to a multiple of the repetition rate.

摘要翻译： 用于确定空间区域（28）中的物体（25）的位置的装置包括光源（3），光引导装置（4-9），至少一个参考信号检测器（11,12）和 检测器装置（13,14）。 光源（3）产生具有重复频率的光脉冲序列。 光引导装置（4-9）将光脉冲序列引导到空间区域（28）中，并作为参考信号（20）指向至少一个参考信号检测器（11,12）。 检测器装置（13,14）通过反射和/或检测装置（13,14）检测在空间区域（28）中由物体（25）反射和/或散射成多个不同方向的多个光信号（23,24） 光脉冲序列的散射。 评估电路（15）耦合到检测器装置（13,14）和至少一个参考信号检测器（11,12），并且确定参考信号（20）与信号分量的相位差（67） 至少一个光信号（23,24）。 基于具有与重复率的倍数相对应的频率的信号分量来确定相位差。

公开(公告)号：US08836955B2

公开(公告)日：2014-09-16

申请号：US13061783

申请日：2009-08-22

申请人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

发明人： Cristina Alvarez Diez ,  Frank Hoeller ,  Bernd Spruck ,  Marc Tremont

IPC分类号： G01B11/24 ,  G01B11/14 ,  G01B11/00 ,  G01S7/481 ,  G01S17/10 ,  G01S13/46

CPC分类号： G01B11/002 ,  G01B11/24 ,  G01S7/4817 ,  G01S17/10 ,  G01S2013/466

摘要： A device for measuring a surface (2) comprises a light source (3), a light directing device (4-6), a detector arrangement (10) and an evaluation circuit (15). The light source (3) generates a sequence of light pulses with a repetition rate. The light directing device (4-6) is controllable to direct the sequence of light pulses onto a surface area (25) of the surface (2). The surface area may be selected from plural surface areas (25, 27). The detector arrangement is configured to receive at least one light signal (21-24) scattered and/or reflected by the surface area (25). The evaluation circuit (15) is coupled to the detector arrangement (10) and is configured to determine a phase difference between a reference signal (19) derived from the sequence of light pulses and a signal component of the at least one light signal (21-24), in order to determine a position of the surface area (25). In doing so, the phase difference is determined for the signal component which has a frequency corresponding to a multiple of the repetition rate.

摘要翻译： 用于测量表面（2）的装置包括光源（3），光引导装置（4-6），检测器装置（10）和评估电路（15）。 光源（3）产生具有重复频率的光脉冲序列。 导光装置（4-6）是可控制的，以将光脉冲序列引导到表面（2）的表面区域（25）上。 表面积可以从多个表面积（25,27）中选择。 检测器装置被配置为接收由表面区域（25）散射和/或反射的至少一个光信号（21-24）。 评估电路（15）耦合到检测器装置（10）并且被配置为确定从光脉冲序列导出的参考信号（19）与至少一个光信号（21）的信号分量之间的相位差 -24），以便确定表面积（25）的位置。 在这样做时，确定具有对应于重复频率的倍数的频率的信号分量的相位差。

公开(公告)号：US20120086933A1

公开(公告)日：2012-04-12

申请号：US13377440

申请日：2010-06-10

申请人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

发明人： Bernd Spruck ,  Frank Hoeller ,  Cristina Alvarez Diez

IPC分类号： G01C3/08

CPC分类号： G01S17/36 ,  G01S17/87

摘要： An evaluation device for path length measurement configured to evaluate a measured signal representing an intensity of a sequence of pulses of electromagnetic radiation, particularly a sequence of light pulses, as a function of time, after the sequence has traveled through a path length to be measured. The sequence of light pulses is generated with a repetition rate by a radiation source, particularly a light source. The evaluation device is configured to evaluate a first component of the measured signal, which oscillates with a first frequency, and a second component of the measured signal, which the second component oscillates with a second frequency that is greater than the first frequency. The first frequency may correspond to the repetition rate or a multiple of the repetition rate. The second frequency may correspond to another multiple of the repetition rate.

摘要翻译： 用于路径长度测量的评估装置，被配置为在所述序列经过要测量的路径长度之后，评估表示电磁辐射脉冲序列强度，特别是光脉冲序列作为时间的函数的测量信号 。 光脉冲的序列以辐射源，特别是光源的重复率产生。 评估装置被配置为评估测量信号的第一分量，其以第一频率振荡，并且测量信号的第二分量，其中第二分量以大于第一频率的第二频率振荡。 第一频率可以对应于重复率或重复率的倍数。 第二频率可以对应于重复频率的另一个倍数。

公开(公告)号：US20060018045A1

公开(公告)日：2006-01-26

申请号：US10971002

申请日：2004-10-25

申请人： Timo Moeller ,  Martin Ross-Messemer ,  Frank Hoeller ,  Sascha Bleidistel

发明人： Timo Moeller ,  Martin Ross-Messemer ,  Frank Hoeller ,  Sascha Bleidistel

IPC分类号： G02B5/08

CPC分类号： G03F7/70266 ,  G02B5/10

摘要： A mirror arrangement for reflecting electromagnetic radiation, the mirror arrangement comprising: a substrate having a mirror side facing towards the radiation to be reflected and a back side opposite to the mirror side, wherein a mirror surface is provided on the mirror side and wherein an actuator arrangement for generating a deformation of the substrate is mounted on the back side of the substrate, wherein the actuator arrangement comprises at least one active layer having an areal adhering contact with a portion of the back side of the substrate; wherein the at least one active layer has a first layer thickness at a first location within the portion and a second layer thickness at a second location disposed at a distance from the first location within the portion, wherein the first layer thickness differs from the second layer thickness by more than 1%; and wherein the at least one active layer comprises at least one of a ferroelectric material, a piezoelectric material, a magnetostrictive material, an electrostrictive material and a memory metal alloy.

摘要翻译： 一种用于反射电磁辐射的反射镜装置，所述反射镜装置包括：基板，其具有面向待反射的辐射的反射镜侧和与所述反射镜侧相反的后侧，其中在所述反射镜侧设置有镜面， 用于产生基板的变形的布置安装在基板的背面上，其中致动器装置包括至少一个有源层，其与基板的背面的一部分具有面接合接触; 其中所述至少一个活性层在所述部分内的第一位置处具有第一层厚度，并且在第二位置处具有第二层厚度，所述第二层厚度设置在所述部分内与所述第一位置相距一定距离处，其中所述第一层厚度与所述第二层厚度不同 厚度超过1％; 并且其中所述至少一个有源层包括铁电材料，压电材料，磁致伸缩材料，电致伸缩材料和记忆金属合金中的至少一种。