Invention Grant
- Patent Title: Apparatus and method for producing solar cells
- Patent Title (中): 用于生产太阳能电池的装置和方法
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Application No.: US13486079Application Date: 2012-06-01
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Publication No.: US08785235B2Publication Date: 2014-07-22
- Inventor: Edward Teng , Ying-Chen Chao , Chih-Jen Yang , Kuo-Jui Hsiao
- Applicant: Edward Teng , Ying-Chen Chao , Chih-Jen Yang , Kuo-Jui Hsiao
- Applicant Address: TW Taichung
- Assignee: TSMC Solar Ltd.
- Current Assignee: TSMC Solar Ltd.
- Current Assignee Address: TW Taichung
- Agency: Duane Morris LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0264 ; H01L21/02 ; H01L21/28

Abstract:
A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.
Public/Granted literature
- US20130210190A1 APPARATUS AND METHOD FOR PRODUCING SOLAR CELLS Public/Granted day:2013-08-15
Information query
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