Invention Grant
- Patent Title: Semiconductor device having vertical channel transistor and methods of fabricating the same
- Patent Title (中): 具有垂直沟道晶体管的半导体器件及其制造方法
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Application No.: US13724799Application Date: 2012-12-21
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Publication No.: US08785998B2Publication Date: 2014-07-22
- Inventor: Hyung-woo Chung , Yong-chul Oh , Yoo-sang Hwang , Gyo-young Jin , Hyeong-sun Hong , Dae-ik Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2010-0047646 20100520
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device includes a first pair of pillars extending from a substrate to form vertical channel regions, the first pair of pillars having a first pillar and a second pillar adjacent to each other, the first pillar and the second pillar arranged in a first direction, a first bit line disposed on a bottom surface of a first trench formed between the first pair of pillars, the first bit line extending in a second direction that is substantially perpendicular to the first direction, a first contact gate disposed on a first surface of the first pillar with a first gate insulating layer therebetween, a second contact gate disposed on a first surface of the second pillar with a second gate insulating layer therebetween, the first surface of the first pillar and the first surface of the second pillar face opposite directions, and a first word line disposed on the first contact gate and a second word line disposed on the second contact gate, the word lines extending in the first direction.
Public/Granted literature
- US20130113029A1 SEMICONDUCTOR DEVICE HAVING VERTICAL CHANNEL TRANSISTOR AND METHODS OF FABRICATING THE SAME Public/Granted day:2013-05-09
Information query
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