Invention Grant
- Patent Title: Semiconductor device and method of forming repassivation layer with reduced opening to contact pad of semiconductor die
- Patent Title (中): 半导体器件和半导体管芯的接触焊盘开口形成再钝化层的方法
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Application No.: US13664626Application Date: 2012-10-31
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Publication No.: US08786100B2Publication Date: 2014-07-22
- Inventor: Yaojian Lin , Kang Chen , Jianmin Fang , Xia Feng
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/538
- IPC: H01L23/538

Abstract:
A semiconductor wafer has a plurality of first semiconductor die. A first conductive layer is formed over an active surface of the die. A first insulating layer is formed over the active surface and first conductive layer. A repassivation layer is formed over the first insulating layer and first conductive layer. A via is formed through the repassivation layer to the first conductive layer. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is mounted to a temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier is removed. A second insulating layer is formed over the repassivation layer and encapsulant. A second conductive layer is formed over the repassivation layer and first conductive layer. A third insulating layer is formed over the second conductive layer and second insulating layer. An interconnect structure is formed over the second conductive layer.
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