Invention Grant
US08786100B2 Semiconductor device and method of forming repassivation layer with reduced opening to contact pad of semiconductor die 有权
半导体器件和半导体管芯的接触焊盘开口形成再钝化层的方法

Semiconductor device and method of forming repassivation layer with reduced opening to contact pad of semiconductor die
Abstract:
A semiconductor wafer has a plurality of first semiconductor die. A first conductive layer is formed over an active surface of the die. A first insulating layer is formed over the active surface and first conductive layer. A repassivation layer is formed over the first insulating layer and first conductive layer. A via is formed through the repassivation layer to the first conductive layer. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is mounted to a temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier is removed. A second insulating layer is formed over the repassivation layer and encapsulant. A second conductive layer is formed over the repassivation layer and first conductive layer. A third insulating layer is formed over the second conductive layer and second insulating layer. An interconnect structure is formed over the second conductive layer.
Information query
Patent Agency Ranking
0/0