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US08787074B2 Static random access memory test structure 失效
静态随机存取测试结构

Static random access memory test structure
摘要:
A static random access memory (SRAM) test structure includes a p-type source/drain implant region comprising contacts (CAs), wherein the CAs in the p-type source/drain implant region comprise a first plurality of bit line, ground, and node CAs, and wherein the CAs in the p-type source/drain implant region are grounded during an inspection of the SRAM test structure; and an ungrounded region, the ungrounded region being distinct from the p-type source/drain implant region and being ungrounded during the inspection of the SRAM test structure, the ungrounded region comprising contacts (CAs) and rectangular contacts (CArecs) comprising a second plurality of bit line, ground, and node CAs, and further comprising a first plurality of Vdd CAs and rectangular contacts (CArecs), and wherein a CA or CArec in the ungrounded region is grounded during the inspection in the event of a short to a CA in the p-type source/drain implant region.
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