发明授权
- 专利标题: Static random access memory test structure
- 专利标题(中): 静态随机存取测试结构
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申请号: US13273271申请日: 2011-10-14
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公开(公告)号: US08787074B2公开(公告)日: 2014-07-22
- 发明人: Oliver D. Patterson , Jin Zheng Wallner , Thomas A. Wallner , Shenzhi Yang
- 申请人: Oliver D. Patterson , Jin Zheng Wallner , Thomas A. Wallner , Shenzhi Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 William Steinberg
- 主分类号: G11C11/00
- IPC分类号: G11C11/00 ; G11C29/50 ; G11C11/41 ; G11C29/04 ; H01L21/66
摘要:
A static random access memory (SRAM) test structure includes a p-type source/drain implant region comprising contacts (CAs), wherein the CAs in the p-type source/drain implant region comprise a first plurality of bit line, ground, and node CAs, and wherein the CAs in the p-type source/drain implant region are grounded during an inspection of the SRAM test structure; and an ungrounded region, the ungrounded region being distinct from the p-type source/drain implant region and being ungrounded during the inspection of the SRAM test structure, the ungrounded region comprising contacts (CAs) and rectangular contacts (CArecs) comprising a second plurality of bit line, ground, and node CAs, and further comprising a first plurality of Vdd CAs and rectangular contacts (CArecs), and wherein a CA or CArec in the ungrounded region is grounded during the inspection in the event of a short to a CA in the p-type source/drain implant region.
公开/授权文献
- US20130094315A1 STATIC RANDOM ACCESS MEMORY TEST STRUCTURE 公开/授权日:2013-04-18
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