Invention Grant
US08789418B2 Inertial sensor and angular velocity detection method using the same
有权
惯性传感器和角速度检测方法使用相同
- Patent Title: Inertial sensor and angular velocity detection method using the same
- Patent Title (中): 惯性传感器和角速度检测方法使用相同
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Application No.: US13591335Application Date: 2012-08-22
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Publication No.: US08789418B2Publication Date: 2014-07-29
- Inventor: Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
- Applicant: Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2011-0099074 20110929
- Main IPC: G01C19/56
- IPC: G01C19/56
Abstract:
Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.
Public/Granted literature
- US20130081465A1 INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME Public/Granted day:2013-04-04
Information query
