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US08792169B2 Optical diffraction gratings and methods for manufacturing same 有权
光学衍射光栅及其制造方法

Optical diffraction gratings and methods for manufacturing same
Abstract:
Described herein are diffraction gratings and methods for the manufacture thereof. One method comprises applying a force to a substrate to strain the substrate, disposing a thin film on at least a portion of the substrate, and reducing the force applied to the substrate, thereby causing the thin film to buckle.
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