发明授权
- 专利标题: Pressure sensor
- 专利标题(中): 压力传感器
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申请号: US13258543申请日: 2010-03-24
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公开(公告)号: US08794077B2公开(公告)日: 2014-08-05
- 发明人: Michael Philipps
- 申请人: Michael Philipps
- 申请人地址: DE Maulburg
- 专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人: Endress + Hauser GmbH + Co. KG
- 当前专利权人地址: DE Maulburg
- 代理机构: Bacon & Thomas, PLLC
- 优先权: DE102009001892 20090326
- 国际申请: PCT/EP2010/053825 WO 20100324
- 国际公布: WO2010/108949 WO 20100930
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounting surface, whose surface normal is given by a first principal crystal axis. A monocrystalline substrate, which, with respect to crystal structure, comprises the same semiconductor material as the membrane body, the substrate has a second mounting surface, whose surface normal extends parallel to the first principal crystal axis. The membrane body is tightly connected to the substrate by joining the first mounting surface to the second mounting surface. The orientations of other principal crystal axes of the membrane body and the substrate are, in each case, oriented parallel relative to one another.
公开/授权文献
- US20120017690A1 Pressure Sensor 公开/授权日:2012-01-26
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