发明授权
- 专利标题: Deformation measuring apparatus and deformation measuring method
- 专利标题(中): 变形测量仪和变形测量方法
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申请号: US13114238申请日: 2011-05-24
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公开(公告)号: US08797515B2公开(公告)日: 2014-08-05
- 发明人: Takashi Sugimoto
- 申请人: Takashi Sugimoto
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA, Inc. IP Division
- 优先权: JP2010-129275 20100604
- 主分类号: G01L1/24
- IPC分类号: G01L1/24 ; G01B11/24 ; G01B11/30 ; G01B11/02 ; G01B9/02 ; G01B11/16
摘要:
An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.
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