发明授权
US08800371B2 Electrostatic force generator and force measurement system and accelerometer having the same
有权
静电力发生器和力测量系统和加速度计具有相同的功能
- 专利标题: Electrostatic force generator and force measurement system and accelerometer having the same
- 专利标题(中): 静电力发生器和力测量系统和加速度计具有相同的功能
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申请号: US13415526申请日: 2012-03-08
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公开(公告)号: US08800371B2公开(公告)日: 2014-08-12
- 发明人: Sheng Jui Chen , Hsiao Hsi Pan
- 申请人: Sheng Jui Chen , Hsiao Hsi Pan
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT, P.C.
- 代理商 Anthony King; Kay Yang
- 主分类号: G01P15/18
- IPC分类号: G01P15/18 ; G01P15/13 ; G01P15/125
摘要:
An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.
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