Invention Grant
US08800371B2 Electrostatic force generator and force measurement system and accelerometer having the same
有权
静电力发生器和力测量系统和加速度计具有相同的功能
- Patent Title: Electrostatic force generator and force measurement system and accelerometer having the same
- Patent Title (中): 静电力发生器和力测量系统和加速度计具有相同的功能
-
Application No.: US13415526Application Date: 2012-03-08
-
Publication No.: US08800371B2Publication Date: 2014-08-12
- Inventor: Sheng Jui Chen , Hsiao Hsi Pan
- Applicant: Sheng Jui Chen , Hsiao Hsi Pan
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C.
- Agent Anthony King; Kay Yang
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01P15/13 ; G01P15/125

Abstract:
An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.
Public/Granted literature
- US20130233077A1 ELECTROSTATIC FORCE GENERATOR AND FORCE MEASUREMENT SYSTEM AND ACCELEROMETER HAVING THE SAME Public/Granted day:2013-09-12
Information query