发明授权
US08802464B2 Method of forming process substrate using thin glass substrate and method of fabricating flat display device using the same
有权
使用薄玻璃基板形成工艺基板的方法和使用其制造平面显示装置的方法
- 专利标题： Method of forming process substrate using thin glass substrate and method of fabricating flat display device using the same
- 专利标题（中）： 使用薄玻璃基板形成工艺基板的方法和使用其制造平面显示装置的方法
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申请号： US13459781申请日： 2012-04-30
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公开(公告)号： US08802464B2公开(公告)日： 2014-08-12
- 发明人: Jae-Won Lee , Ki-Yong Kim , Jae Young Oh , Yong-Su An , Sung-Ki Kim , Gi-Sang Hong , Jin-Bok Lee , Sang-Hyuk Won , Dong-Kyu Lee
- 申请人： Jae-Won Lee , Ki-Yong Kim , Jae Young Oh , Yong-Su An , Sung-Ki Kim , Gi-Sang Hong , Jin-Bok Lee , Sang-Hyuk Won , Dong-Kyu Lee
- 申请人地址： KR Seoul
- 专利权人： LG Display Co., Ltd.
- 当前专利权人： LG Display Co., Ltd.
- 当前专利权人地址： KR Seoul
- 代理机构： Morgan, Lewis & Bockius LLP
- 优先权： KR10-2011-0072680 20110721; KR10-2012-0006983 20120120
- 主分类号： H01L21/58
- IPC分类号： H01L21/58
摘要：
A method for fabricating a process substrate includes: providing a first substrate; providing a substrate and an auxiliary substrate; contacting the substrate and the auxiliary substrate with each other in a vacuum state, thereby forming micro spaces of a vacuum state between the substrate and the auxiliary substrate; and increasing a pressure at the outside of the contacted substrate and auxiliary substrate to attach the substrate and the auxiliary substrate to each other by a pressure difference between the micro spaces and the outside of the contacted substrate and auxiliary substrate.