发明授权
- 专利标题： Device and method to create a low divergence, high power laser beam for material processing applications
- 专利标题（中）： 用于材料处理应用的低发散高功率激光束的设备和方法
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申请号： US11805596申请日： 2007-05-23
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公开(公告)号： US08803027B2公开(公告)日： 2014-08-12
- 发明人: Thomas Hofmann
- 申请人： Thomas Hofmann
- 申请人地址： US CA San Diego
- 专利权人： Cymer, LLC
- 当前专利权人： Cymer, LLC
- 当前专利权人地址： US CA San Diego
- 代理机构： Procopio, Cory, Hargreaves & Savitch, LLP
- 代理商 Noel C. Gillespie
- 主分类号： B23K26/00
- IPC分类号： B23K26/00
摘要：
A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a piano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film.