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US08806915B2 Microfabricated particulate matter monitor 有权
微生物颗粒物监测仪

Microfabricated particulate matter monitor
摘要:
An apparatus for measuring concentrations of airborne particulate matter may include, in one embodiment, a primary channel to receive air samples from the external environment. The air samples include particles of varying sizes. A microfluidic circuit communicates with the primary channel and small particles (having a size less than a threshold size) are diverted around a bend into a secondary channel. Remaining larger particles are unable to make the bend and continue through the primary channel. A mass-sensitive element communicating with the secondary channel includes a collection surface to collect the small particles. A resonant frequency of the mass-sensitive element is reduced in proportion to the mass of the particles collected.
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