发明授权
- 专利标题: Method for making thermionic electron emission device
- 专利标题(中): 制造热离子电子发射装置的方法
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申请号: US13301658申请日: 2011-11-21
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公开(公告)号: US08808554B2公开(公告)日: 2014-08-19
- 发明人: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
- 申请人: Peng Liu , Liang Liu , Kai-Li Jiang , Shou-Shan Fan
- 申请人地址: CN Beijing TW New Taipei
- 专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址: CN Beijing TW New Taipei
- 代理机构: Novak, Druce Connolly Bove + Quigg LLP
- 优先权: CN200710125672 20071229
- 主分类号: H01B13/00
- IPC分类号: H01B13/00 ; B44C1/22
摘要:
A method for making a thermionic electron emission device. The method includes the following steps. First, an insulating substrate is provided. Second, a number of lattices are formed on the insulating substrate. Third, a first electrode and a second electrode are fabricated in each lattice on the insulating substrate. Fourth, a carbon nanotube film structure is provided and at least part of the carbon nanotube film is suspended structure above the insulating substrate. Sixth, excess carbon nanotube film structure is cut away to obtain a number of thermionic electron emitters. The thermionic electron emitters are spaced from each other and located between the first electrode and the second electrode in each lattice.
公开/授权文献
- US20120064794A1 METHOD FOR MAKING THERMIONIC ELECTRON EMISSION DEVICE 公开/授权日:2012-03-15
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