发明授权
- 专利标题： Sub-resolution assist feature arranging method and computer program product and manufacturing method of semiconductor device
- 专利标题（中）： 分解辅助功能布置方法和计算机程序产品及半导体器件的制造方法
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申请号： US13051961申请日： 2011-03-18
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公开(公告)号： US08809072B2公开(公告)日： 2014-08-19
- 发明人: Chikaaki Kodama , Toshiya Kotani , Shigeki Nojima , Shoji Mimotogi
- 申请人： Chikaaki Kodama , Toshiya Kotani , Shigeki Nojima , Shoji Mimotogi
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权： JP2010-123100 20100528
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G01R31/26
摘要：
According to a sub-resolution assist feature arranging method in embodiments, it is selected which of a rule base and a model base is set for which pattern region on pattern data corresponding to a main pattern as a type of the method of arranging the sub-resolution assist feature for improving resolution of the main pattern formed on a substrate. Then, the sub-resolution assist feature by the rule base is arranged in a pattern region set as the rule base and the sub-resolution assist feature by the model base is arranged in a pattern region set as the model base.