发明授权
- 专利标题： Method for manufacturing a light-emitting element including a protective film for a charge injection layer
- 专利标题（中）： 包括电荷注入层用保护膜的发光元件的制造方法
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申请号： US13205765申请日： 2011-08-09
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公开(公告)号： US08822246B2公开(公告)日： 2014-09-02
- 发明人: Tetsuro Kondoh , Kou Sugano , Seiji Nishiyama
- 申请人： Tetsuro Kondoh , Kou Sugano , Seiji Nishiyama
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JP2009-028969 20090210
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L51/50 ; H01L51/56 ; H01L27/32
摘要：
A method for manufacturing a light-emitting element. An anode is formed on a main surface of a substrate. A hole-injection layer is formed at least above the anode. At least the hole-injection layer is covered with a protective film. A bank which is provided with an aperture through which a portion of the protective film is exposed, is formed on the protective film by a wet process. The portion of the protective film exposed through the aperture is removed so that a portion of the hole-injection layer is exposed, a light-emitting layer is formed on the hole-injection layer exposed through the aperture, and a cathode is formed above the light-emitting layer. The protective film is resistant to a fluid used during the wet process.
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