发明授权
- 专利标题: Semiconductor memory devices
- 专利标题(中): 半导体存储器件
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申请号: US13587476申请日: 2012-08-16
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公开(公告)号: US08824184B2公开(公告)日: 2014-09-02
- 发明人: Ingyu Baek , Chanjin Park , Hyunsu Ju
- 申请人: Ingyu Baek , Chanjin Park , Hyunsu Ju
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2011-0081736 20110817
- 主分类号: G11C5/02
- IPC分类号: G11C5/02 ; G11C8/14 ; G11C7/18 ; G11C5/06
摘要:
A semiconductor memory device includes a stacked structure including a plurality of wordline structures sequentially stacked that each include: a plurality of wordlines with sidewalls and extending in a first direction on the substrate, and a connecting pad extending in a second direction on the substrate and being connected in common to the plurality of wordlines. A plurality of interconnections at a height over the substrate are connected to the connecting pads of the wordline structures, respectively. The device further includes bitlines substantially vertical to a top surface of the substrate and crossing one of the sidewalls of the plurality of wordlines, and memory elements between the bitlines and the plurality of wordlines, respectively. A length of the connecting pad in the second direction is substantially equal to a product of a minimum pitch between the interconnections and a stack number of one of the plurality of wordlines.
公开/授权文献
- US20130044531A1 SEMICONDUCTOR MEMORY DEVICES 公开/授权日:2013-02-21
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