Invention Grant
- Patent Title: Alteration for wafer inspection
- Patent Title (中): 晶圆检查更改
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Application No.: US13893267Application Date: 2013-05-13
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Publication No.: US08826200B2Publication Date: 2014-09-02
- Inventor: Allen Park , Ellis Chang
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Methods and systems for binning defects on a wafer are provided. One method includes identifying areas in a design for a layer of a device being fabricated on a wafer that are not critical to yield of fabrication of the device and generating an altered design for the layer by eliminating features in the identified areas from the design for the layer. The method also includes binning defects detected on the layer into groups using the altered design such that features in the altered design proximate positions of the defects in each of the groups are at least similar.
Public/Granted literature
- US20130318485A1 Design Alteration for Wafer Inspection Public/Granted day:2013-11-28
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