发明授权
- 专利标题： Device for resonantly driving a micromechanical system
- 专利标题（中）： 用于共振驱动微机械系统的装置
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申请号： US13259976申请日： 2010-01-28
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公开(公告)号： US08826735B2公开(公告)日： 2014-09-09
- 发明人: Axel Franke , Frank Freund , Daniel Christoph Meisel
- 申请人： Axel Franke , Frank Freund , Daniel Christoph Meisel
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Kenyon & Kenyon LLP
- 优先权： DE102009001856 20090325
- 国际申请： PCT/EP2010/051008 WO 20100128
- 国际公布： WO2010/108712 WO 20100930
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.
公开/授权文献
- US20120104978A1 Device for resonantly driving a micromechanical system 公开/授权日：2012-05-03
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