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    Device for resonantly driving a micromechanical system
    1.
    发明授权
    Device for resonantly driving a micromechanical system 有权
    用于共振驱动微机械系统的装置

    公开(公告)号：US08826735B2

    公开(公告)日：2014-09-09

    申请号：US13259976

    申请日：2010-01-28

    申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5755

    摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

    摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

    Device for resonantly driving a micromechanical system
    2.
    发明申请
    Device for resonantly driving a micromechanical system 有权
    用于共振驱动微机械系统的装置

    公开(公告)号：US20120104978A1

    公开(公告)日：2012-05-03

    申请号：US13259976

    申请日：2010-01-28

    申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

    IPC分类号： H02N1/00

    CPC分类号： G01C19/5755

    摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

    摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

    YAW-RATE SENSOR
    4.
    发明申请
    YAW-RATE SENSOR 审中-公开
    YAW-RATE传感器

    公开(公告)号：US20140326070A1

    公开(公告)日：2014-11-06

    申请号：US14334407

    申请日：2014-07-17

    申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01P3/44 ,  F16F1/02 ,  G01C19/574

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    YAW-RATE SENSOR
    5.
    发明申请
    YAW-RATE SENSOR 有权
    YAW-RATE传感器

    公开(公告)号：US20120060604A1

    公开(公告)日：2012-03-15

    申请号：US12734228

    申请日：2008-10-02

    申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

    IPC分类号： G01P3/44 ,  F16F3/00

    CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

    摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

    摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

    Hybrid integrated component
    6.
    发明授权
    Hybrid integrated component 有权
    混合集成组件

    公开(公告)号：US09266720B2

    公开(公告)日：2016-02-23

    申请号：US14059202

    申请日：2013-10-21

    申请人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

    发明人： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

    IPC分类号： B81C1/00

    CPC分类号： B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

    摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

    摘要翻译： 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。

    HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
    7.
    发明申请
    HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF 有权
    混合互联组件及其制造方法

    公开(公告)号：US20130299927A1

    公开(公告)日：2013-11-14

    申请号：US13888920

    申请日：2013-05-07

    申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

    发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

    IPC分类号： B81B3/00 ,  B81C1/00

    CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

    摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

    摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

    Drive element and method for operating a drive element
    8.
    发明授权
    Drive element and method for operating a drive element 有权
    用于操作驱动元件的驱动元件和方法

    公开(公告)号：US08427031B2

    公开(公告)日：2013-04-23

    申请号：US12645120

    申请日：2009-12-22

    申请人： Axel Franke

    发明人： Axel Franke

    IPC分类号： H02N1/00

    CPC分类号： B81B3/0021 ,  B81B2203/0136 ,  B81B2203/04 ,  G02B5/284 ,  G02B26/001 ,  G02B26/0841 ,  G09G3/3433 ,  H02N1/008 ,  H03H9/02275

    摘要： A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.

    摘要翻译： 提供具有基板，地震块，驱动电极和对电极的驱动元件，两个电极中的一个连接到基板，并且两个电极中的另一个连接到地震块; 并且所述驱动电极和所述对置电极被设置为用于激励所述地震块在主运动方向上的运动; 此外，驱动电极包括可彼此分开切换的第一和第二部分电极。

    Hot-film air mass meter having frequency-modulated signal detection
    10.
    发明授权
    Hot-film air mass meter having frequency-modulated signal detection 有权
    具有调频信号检测的热膜空气质量计

    公开(公告)号：US07861586B2

    公开(公告)日：2011-01-04

    申请号：US11990573

    申请日：2006-06-13

    申请人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

    发明人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6986 ,  G01F1/6845 ,  G01F1/692

    摘要： A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

    摘要翻译： 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面，测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 实施该方法使得使用频率ω周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器，至少检测两个测量信号。 使用频率ω调制至少两个测量信号的测量信号和/或至少一个差分信号。