Invention Grant
US08827548B2 Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
有权
用于微生物量热计的细胞生理学和微生物细胞定位系统的聚合物NEM
- Patent Title: Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
- Patent Title (中): 用于微生物量热计的细胞生理学和微生物细胞定位系统的聚合物NEM
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Application No.: US13110684Application Date: 2011-05-18
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Publication No.: US08827548B2Publication Date: 2014-09-09
- Inventor: Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
- Applicant: Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Gates & Cooper LLP
- Main IPC: G01K17/02
- IPC: G01K17/02 ; G01N25/20

Abstract:
A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
Public/Granted literature
- US20110216804A1 POLYMER NEMS FOR CELL PHYSIOLOGY AND MICROFABRICATED CELL POSITIONING SYSTEM FOR MICRO-BIOCALORIMETER Public/Granted day:2011-09-08
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