公开(公告)号：US20110216804A1

公开(公告)日：2011-09-08

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/00

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US07966898B2

公开(公告)日：2011-06-28

申请号：US11830612

申请日：2007-07-30

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01L1/22

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20100024572A1

公开(公告)日：2010-02-04

申请号：US11830612

申请日：2007-07-30

申请人： MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

发明人： MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

IPC分类号： G01L1/18 ,  B44C1/22

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流控嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US08827548B2

公开(公告)日：2014-09-09

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/02 ,  G01N25/20

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。