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US08828779B2 Backside illumination (BSI) CMOS image sensor process 有权
背面照明(BSI)CMOS图像传感器工艺

Backside illumination (BSI) CMOS image sensor process
Abstract:
A backside illumination (BSI) CMOS image sensing process includes the following steps. A substrate having an active side is provided. A curving process is performed to curve the active side. A reflective layer is formed on the active side, so that at least a curved mirror is formed on the active side.
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