Invention Grant
- Patent Title: Repairing anomalous stiff pillar bumps
- Patent Title (中): 修复异常僵硬的柱状突起
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Application No.: US14083962Application Date: 2013-11-19
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Publication No.: US08829675B2Publication Date: 2014-09-09
- Inventor: Vivian W. Ryan , Holm Geisler , Dirk Breuer
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00 ; H01L21/66 ; H01L23/488
Abstract:
A system for repairing pillar bumps includes a pillar bump repair device that is adapted to form a plurality of strain-relieving notches in a pillar bump that is positioned above a metallization system of a semiconductor chip. The system further includes a pillar bump support device that is adapted to substantially support the pillar bump while the pillar bump repair device is forming each of the plurality of strain-relieving notches.
Public/Granted literature
- US20140077368A1 REPAIRING ANOMALOUS STIFF PILLAR BUMPS Public/Granted day:2014-03-20
Information query
IPC分类:
