发明授权
- 专利标题: Sensor system and method for calibrating a sensor system
- 专利标题(中): 用于校准传感器系统的传感器系统和方法
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申请号: US13197084申请日: 2011-08-03
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公开(公告)号: US08833135B2公开(公告)日: 2014-09-16
- 发明人: Axel Franke , Mirko Hattass , Alexander Buhmann , Marian Keck
- 申请人: Axel Franke , Mirko Hattass , Alexander Buhmann , Marian Keck
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102010039236 20100812
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P21/00 ; G01P15/08
摘要:
A sensor system having a substrate and a mass which is movably suspended relative to the substrate is described, the sensor system including detection arrangement for detecting a deflection of the seismic mass relative to the substrate along a deflection direction, the detection arrangement including a first measuring electrode affixed to the substrate and a second measuring electrode affixed to the substrate, and a first overlap, which is perpendicular to the deflection direction, between the first measuring electrode and the seismic mass along the deflection direction is greater than a second overlap, which is perpendicular to the deflection direction, between the second measuring electrode and the seismic mass.
公开/授权文献
- US20120036915A1 SENSOR SYSTEM AND METHOD FOR CALIBRATING A SENSOR SYSTEM 公开/授权日:2012-02-16
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