发明授权
- 专利标题： Miniaturized piezoelectric accelerometers
- 专利标题（中）： 小型化压电加速度计
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申请号： US13202091申请日： 2009-09-04
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公开(公告)号： US08833165B2公开(公告)日： 2014-09-16
- 发明人: Kui Yao , Saravanan Shanmugavel , Trung Dung Luong , Ajit S. Gaunekar , Hon Yu Peter Ng
- 申请人： Kui Yao , Saravanan Shanmugavel , Trung Dung Luong , Ajit S. Gaunekar , Hon Yu Peter Ng
- 申请人地址： SG Singapore
- 专利权人： Agency for Science, Technology and Research
- 当前专利权人： Agency for Science, Technology and Research
- 当前专利权人地址： SG Singapore
- 代理机构： Blakely, Sokoloff, Taylor & Zafman LLP
- 国际申请： PCT/SG2009/000315 WO 20090904
- 国际公布： WO2010/096020 WO 20100826
- 主分类号： G01P15/09
- IPC分类号： G01P15/09 ; G01P15/18 ; G01P15/08
摘要：
The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).
公开/授权文献
- US20110296918A1 MINIATURIZED PIEZOELECTRIC ACCELEROMETERS 公开/授权日：2011-12-08
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