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公开(公告)号：US08833165B2
公开(公告)日：2014-09-16
申请号：US13202091
申请日：2009-09-04
CPC分类号： G01P15/0922 , G01P15/0802 , G01P15/18 , G01P2015/084
摘要： The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).
摘要翻译： 小型压电加速度计包括具有空腔（104）的支撑框架（102）和由从支撑框架（102）延伸的多个悬挂梁（110）支撑的地震块体（108）。 每个悬架梁（110）具有涂覆在其顶表面上的压电薄膜，其中沉积在每个压电薄膜的上表面上的一对数字间电极（114）。 加速度的存在激发弯曲并因此在压电薄膜中变形，这又导致在电极（114）的端子上产生电信号。 为了积累地收集电极（114）的输出，每个电极（114）的一个端子被路由到电气连接在地震质量块（108）的顶表面（308）处。
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2.发明申请公开(公告)号：US20120137787A1
公开(公告)日：2012-06-07
申请号：US13390515
申请日：2010-08-13
申请人： Kui Yao , Chin Yaw Tan , Ajit S. Gaunekar , Hon Yu Peter Ng
发明人： Kui Yao , Chin Yaw Tan , Ajit S. Gaunekar , Hon Yu Peter Ng
CPC分类号： G01L1/16 , H01L41/1132 , H01L41/257 , H01L41/29 , H01L41/317 , H01L41/45 , Y10T29/42
摘要： A piezoelectric sensor comprising a piezoelectric film formed on a surface of an object to be monitored; a plurality of electrodes formed on a surface of the piezoelectric film; and wherein electrical polarization of the piezoelectric film is about coplanar with the surface of the piezoelectric film. A method of forming a piezoelectric sensor. The method comprises forming a piezoelectric film on a surface of an object to be monitored; forming electrodes on a surface of the piezoelectric film; and orientating electrical polarization in the piezoelectric film to be about coplanar with the surface of the piezoelectric film.
摘要翻译： 一种压电传感器，包括形成在待监测对象的表面上的压电膜; 形成在所述压电膜的表面上的多个电极; 并且其中所述压电膜的电极化与所述压电膜的表面大致共面。 一种形成压电传感器的方法。 该方法包括在待监测对象的表面上形成压电膜; 在所述压电膜的表面上形成电极; 并且将压电膜中的电极化定向为与压电膜的表面大致共面。
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公开(公告)号：US06899262B2
公开(公告)日：2005-05-31
申请号：US10441859
申请日：2003-05-19
CPC分类号： H01L24/78 , B23K20/004 , B23K37/0435 , B25B5/04 , B25B5/06 , H01L2224/786 , H01L2224/851 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01082 , H01L2224/48 , H01L2224/45099
摘要： A clamping device is provided for clamping an object, such as bonding wire for a wire bonding machine. The device comprises a pair of clamping arms arranged in pivotal relationship with each other about a pivot point, the clamping arms having clamping ends movable between an open position and a closed position. An attraction device is operative to provide an attraction force between the clamping arms about the pivot point. The device includes biasing means that is operative to provide a biasing force in opposition to the attraction force about the pivot point, such that the biasing force is operative to bias the clamping ends towards the closed position. In a preferred embodiment, the biasing means comprises a flexure bearing.
摘要翻译： 提供夹紧装置用于夹紧物体，例如用于引线接合机的接合线。 该装置包括一对夹紧臂，其相对于枢转点彼此枢转地布置，夹紧臂具有可在打开位置和关闭位置之间移动的夹紧端。 吸引装置可操作以在夹持臂围绕枢转点提供吸引力。 该装置包括偏压装置，其可操作地提供与围绕枢转点的吸引力相反的偏压力，使得偏压力可操作以将夹持端朝向关闭位置偏置。 在优选实施例中，偏置装置包括挠曲轴承。
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公开(公告)号：US07202956B2
公开(公告)日：2007-04-10
申请号：US10962119
申请日：2004-10-08
IPC分类号： G01B11/24
CPC分类号： G01B5/0004 , G01B11/0608 , G01B11/2527 , G02B21/26
摘要： An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.
摘要翻译： 公开了一种用于使用包括位于由磁体组件产生的磁场中的线圈的线性致动器相对于待检查物体移动光机械检查系统的光学部件的装置。 平移台耦合到所述线圈和磁体组件中的任一个，由此平移台配置成相对于所述线圈和磁体组件中的另一个运动。 平移台的移动沿着基本上垂直于从光源通过光学部件投射到物体上的入射光的方向的平面配置。
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公开(公告)号：US06713903B2
公开(公告)日：2004-03-30
申请号：US10223229
申请日：2002-08-15
申请人： Gary Peter Widdowson , You Yong Liao , Gang Ou , Ajit S. Gaunekar
发明人： Gary Peter Widdowson , You Yong Liao , Gang Ou , Ajit S. Gaunekar
IPC分类号： H02K4100
CPC分类号： G03F7/70758 , H02K16/00 , H02K41/03 , H02K2201/18
摘要： The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.
摘要翻译： 本发明提供了一种用于定位负载的电机系统和方法。 该系统包括支撑装置，例如用于支撑负载的XY工作台。 第一电动机和第二电动机协作以驱动负载，由此第一电动机适于提供比第二电动机更高的推力，并且第二电动机适于在定位顺序期间提供比第一电动机更高的定位精度以将负载 。
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