发明授权
- 专利标题: Fuse and integrated conductor
- 专利标题(中): 保险丝和集成导体
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申请号: US13414742申请日: 2012-03-08
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公开(公告)号: US08836124B2公开(公告)日: 2014-09-16
- 发明人: Griselda Bonilla , Kaushik Chanda , Samuel Sung Shik Choi , Ronald G. Filippi , Stephan Grunow , Naftali Eliahu Lustig , Andrew H. Simon
- 申请人: Griselda Bonilla , Kaushik Chanda , Samuel Sung Shik Choi , Ronald G. Filippi , Stephan Grunow , Naftali Eliahu Lustig , Andrew H. Simon
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Bond Schoeneck & King, PLLC
- 代理商 George R. McGuire; Catherine Ivers
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
A fuse structure includes within an aperture within a dielectric layer located over a substrate that exposes a conductor contact layer within the substrate a seed layer interposed between the conductor contact layer and another conductor layer. The seed layer includes a doped copper material that includes a dopant immobilized predominantly within the seed layer. The fuse structure may be severed while not severing a conductor interconnect structure also located over the substrate that exposes a second conductor contact layer within a second aperture. In contrast with the fuse structure that includes the doped seed layer having the immobilized dopant, the interconnect structure includes a doped seed layer having a mobile dopant.
公开/授权文献
- US20130234284A1 Fuse and Integrated Conductor 公开/授权日:2013-09-12
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