Invention Grant
- Patent Title: Microelectromechanical transducer and corresponding assembly process
- Patent Title (中): 微机电传感器和相应的组装过程
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Application No.: US13402761Application Date: 2012-02-22
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Publication No.: US08837754B2Publication Date: 2014-09-16
- Inventor: Kevin Formosa , Mark Anthony Azzopardi , Mario Francesco Cortese , Mark Shaw , Alex Gritti , Luca Maggi , Filippo David
- Applicant: Kevin Formosa , Mark Anthony Azzopardi , Mario Francesco Cortese , Mark Shaw , Alex Gritti , Luca Maggi , Filippo David
- Applicant Address: IT Agrate Brianza MT Kirkop
- Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd.
- Current Assignee: STMicroelectronics S.r.l.,STMicroelectronics (Malta) Ltd.
- Current Assignee Address: IT Agrate Brianza MT Kirkop
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2009A1036 20091223
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/00 ; B81C1/00 ; H04R9/08 ; H04R11/04 ; H04R17/02 ; H04R19/04 ; H04R21/02

Abstract:
A MEMS transducer has a micromechanical sensing structure and a package. The package is provided with a substrate, carrying first electrical-connection elements, and with a lid, coupled to the substrate to define an internal cavity, in which the micromechanical sensing structure is housed. The lid is formed by: a cap layer having a first surface and a second surface, set opposite to one another, the first surface defining an external face of the package and the second surface facing the substrate inside the package; and a wall structure, set between the cap layer and the substrate, and having a coupling face coupled to the substrate. At least a first electrical component is coupled to the second surface of the cap layer, inside the package, and the coupling face of the wall structure carries second electrical-connection elements, electrically connected to the first electrical component and to the first electrical-connection elements.
Public/Granted literature
- US20120153771A1 MICROELECTROMECHANICAL TRANSDUCER AND CORRESPONDING ASSEMBLY PROCESS Public/Granted day:2012-06-21
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